Apparatus and method for shielding a controlled pressure environment
US9879684B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2013 |
| Grant date | Jan 30, 2018 |
| Priority date | — |
| Expiry date | Apr 12, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32513
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An apparatus for shielding a controlled pressure environment, including a shield assembly with: a gate disc arranged for location in a chamber and including a first continuous surface facing an opening in the chamber and including an outer circumference extending past the opening in a radial direction orthogonal to a longitudinal axis passing through the chamber and the opening; and an at least one actuator arranged to displace the gate disc in an axial direction parallel to the longitudinal axis. The opening is arranged for connection to an inlet of a vacuum pump. In an example embodiment, the thermal system attains and maintains thermal equilibrium in the chamber and/or to shields the chamber from unwanted thermal affects by heating or cooling the gate disc to offset cooling or heat generated by the vacuum pump. For example, the gate disc is cooled to offset heat generated by a turbo-molecular pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.