Inventor · Los Gatos, CA, US

Salam Harb

11Patents
2h-index
21Co-inventors
46Inventor score

Filing activity: May 30, 2006 → Aug 22, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US8664594B1 Electron-optical system for high-speed and high-sensitivity inspections Electricity 102 Active
US7800735B2 Z-stage with dynamically driven stage mirror and chuck assembly Emerging Cross-Sectional Technologies 2 Active
US8169768B1 Electrostatic chuck Electricity 2 Active
US7919193B1 Shielding, particulate reducing high vacuum components Emerging Cross-Sectional Technologies 1 Active
US8390789B2 Z-stage with dynamically driven stage mirror and chuck assembly Emerging Cross-Sectional Technologies 1 Active
US7566873B1 High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus Electricity 1 Active
US10953441B2 System and method for cleaning optical surfaces of an extreme ultraviolet optical system Physics 1 Active
US9874512B2 Method and system for gas flow mitigation of molecular contamination of optics Physics 0 Active
US9879684B2 Apparatus and method for shielding a controlled pressure environment Electricity 0 Active
US8092927B2 Shielding, particulate reducing high vacuum components Emerging Cross-Sectional Technologies 0 Active
US9141002B2 Z-stage with dynamically driven stage mirror and chuck assembly having constraint Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.