Salam Harb
11Patents
2h-index
21Co-inventors
46Inventor score
Filing activity: May 30, 2006 → Aug 22, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8664594B1 | Electron-optical system for high-speed and high-sensitivity inspections | Electricity | 102 | Active |
| US7800735B2 | Z-stage with dynamically driven stage mirror and chuck assembly | Emerging Cross-Sectional Technologies | 2 | Active |
| US8169768B1 | Electrostatic chuck | Electricity | 2 | Active |
| US7919193B1 | Shielding, particulate reducing high vacuum components | Emerging Cross-Sectional Technologies | 1 | Active |
| US8390789B2 | Z-stage with dynamically driven stage mirror and chuck assembly | Emerging Cross-Sectional Technologies | 1 | Active |
| US7566873B1 | High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus | Electricity | 1 | Active |
| US10953441B2 | System and method for cleaning optical surfaces of an extreme ultraviolet optical system | Physics | 1 | Active |
| US9874512B2 | Method and system for gas flow mitigation of molecular contamination of optics | Physics | 0 | Active |
| US9879684B2 | Apparatus and method for shielding a controlled pressure environment | Electricity | 0 | Active |
| US8092927B2 | Shielding, particulate reducing high vacuum components | Emerging Cross-Sectional Technologies | 0 | Active |
| US9141002B2 | Z-stage with dynamically driven stage mirror and chuck assembly having constraint | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.