Method of manufacturing a motion sensor device
US9880192B2 · kind B2 · utility
4Cited by
13References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2015 |
| Grant date | Jan 30, 2018 |
| Priority date | — |
| Expiry date | Jul 28, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/43
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Micro-Electro-Mechanical System (MEMS) device includes a sensing element, and a proof mass over and overlapping at least a portion of the sensing element. The proof mass is configured to be movable toward the sensing element. A protection region is formed between the sensing element and the proof mass. The protection region overlaps a first portion of the sensing element, and does not overlap a second portion of the sensing element, wherein the first and the second portions overlap the proof mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.