Patent · US Active

System for producing structures in a substrate

US9880474B2 · kind B2 · utility

2Cited by

0References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventor

Michael Patra · Oberkochen, DE

Key dates

Filing date	Nov 12, 2015
Grant date	Jan 30, 2018
Priority date	—
Expiry date	Nov 16, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70558
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The disclosure provides a system for producing structures in a substrate. The system includes a projection exposure system. The projection exposure system includes a projection optical unit and an illumination system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.