Polishing equipment having discontinuous adhesion points and method for making the sheet
US9889630B2 · kind B2 · utility
0Cited by
3References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2009 |
| Grant date | Feb 13, 2018 |
| Priority date | — |
| Expiry date | Sep 24, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24562
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The sheet of a polishing equipment of the present invention includes a buffer layer, an adsorption layer, and an adhesion layer. The adhesion layer is disposed between the buffer layer and the adsorption layer. The adhesion layer has a plurality of adhesion points to bind the buffer layer and the adsorption layer together. The adhesion points are discontinuous and have gaps in between. Consequently, when the sheet is pressed, air can be vented out through the gaps between the adhesion points, so that the adsorption force is increased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.