Patent · US Active

Method for manufacturing a micromechanical component

US9890035B2 · kind B2 · utility

3Cited by

12References

6Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Achim Breitling · Echterdingen, DE
Frank Reichenbach · Wannweil, DE
Jochen Reinmuth · Reutlingen, DE
Julia Amthor · Reutlingen, DE

Key dates

Filing date	Jan 9, 2017
Grant date	Feb 13, 2018
Priority date	—
Expiry date	Jan 9, 2037

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0145
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method is provided for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. A first crystalline layer or a first amorphous layer or a first nanocrystalline layer or a first polycrystalline layer is deposited on or grown on a surface of the substrate or of the cap. A recess is introduced into the substrate or into the cap for accommodating the first crystalline layer or the first amorphous layer or the first nanocrystalline layer or the first polycrystalline layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.