Patent · US Active

Fan-out panel level package and method of fabricating the same

US9892980B2 · kind B2 · utility

0Cited by
4References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 21, 2017
Grant dateFeb 13, 2018
Priority date
Expiry dateFeb 21, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/15747
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of fabricating a package includes providing a mold substrate supporting dies in cavities of a fan-out substrate, detecting positions of the dies with respect to the fan-out substrate, and forming interconnection lines. At least one of the interconnection lines includes a first portion extending from the fan-out substrate to a target position on the cavity disposed between the fan-out substrate and one of the dies the one of the dies disposed at a detected position different from the target position, and a second portion extending from the one die to the fan-out substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.