Charged-particle beam microscope with an evaporator
US9899186B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2017 |
| Grant date | Feb 20, 2018 |
| Priority date | — |
| Expiry date | Feb 6, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged-particle beam microscope is provided for imaging a sample. The microscope has a vacuum chamber to maintain a low-pressure environment. A stage is provided to hold a sample in the vacuum chamber. The microscope has a compact evaporator in the vacuum chamber to evaporate and deposit a coating onto a surface of the sample. The microscope also has a charged-particle beam column is provided to direct a charged-particle beam onto the coating on the surface of the sample. The charged-particle beam column includes a charged-particle beam source to generate a charged-particle beam and charged-particle beam optics to converge the charged-particle beam onto the sample. A detector is provided to detect charged-particle radiation emanating from the coating on the surface of the sample to generate an image. A controller analyzes the detected charged-particle radiation to generate an image of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.