Universal service cart for semiconductor system maintenance
US9902415B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2016 |
| Grant date | Feb 27, 2018 |
| Priority date | — |
| Expiry date | Aug 11, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A service cart for storing components of a substrate processing system includes a first side configured to store a transfer plate removed from the substrate processing system. The first side includes a first mount and a second mount that are spaced apart to retain respective upper portions of the transfer plate. Each of the first mount and the second mount includes a respective groove arranged to retain the upper portions of the transfer plate. The first side further includes a first bumper and a second bumper that are spaced apart to abut respective lower portions of the transfer plate. Each of the first bumper and the second bumper are arranged to retain a desired distance between the first side and the lower portions of the transfer plate. A second side of the service cart includes a drawer or an opening to provide access to an interior of the service cart.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.