Sensor network supporting self-calibration of pressure sensors
US9903779B2 · kind B2 · utility
13Cited by
3References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 9, 2015 |
| Grant date | Feb 27, 2018 |
| Priority date | — |
| Expiry date | Mar 28, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor system comprises one or more self-calibrating pressure sensors for self-calibrating sensor parameters based on a membrane deflection or a membrane displacement from an electrostatic force and a single reference pressure from an additional sensor. The additional sensor has a greater accuracy level or range than the self-calibrating sensor. Sensor parameters are derived from capacitance measurements and a single pressure measurement, which are utilized for self-calibration to one or more target values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.