Spectral mapping of photo emission
US9903824B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2015 |
| Grant date | Feb 27, 2018 |
| Priority date | — |
| Expiry date | Nov 6, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/66
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for optical probing of a DUT is disclosed. The system enables identifying, localizing and classifying faulty devices within the DUT. A selected area of the DUT is imaged while the DUT is receiving test signals, which may be static or dynamic, i.e., causing certain of the active devices to modulate. Light from the DUT is collected and is passed through a transparent diffracting grating prior to imaging it by a sensor and converting it into an electrical signal. The resulting image includes the zero order and first order diffraction of the grating. The grating is configured such that the zero order is in registration with emission sites imaged when the grating is outside the optical path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.