Patent · US Active

Semiconductor constructions and methods of forming intersecting lines of material

US9911643B2 · kind B2 · utility

2Cited by
1References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 14, 2016
Grant dateMar 6, 2018
Priority date
Expiry dateJun 14, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Some embodiments include semiconductor constructions having first and second electrically conductive lines that intersect with one another at an intersection. The first line has primarily a first width, and has narrowed regions directly against the second line and on opposing sides of the second line from one another. Electrically conductive contacts are along the first line and directly electrically coupled to the first line, and one of the electrically conductive contacts is directly against the intersection. Some embodiments include methods of forming intersecting lines of material. First and second trenches are formed, and intersect with one another at an intersection. The first trench has primarily a first width, and has narrowed regions directly against the second trench and on opposing sides of the second trench from one another. Material is deposited within the first and second trenches to substantially entirely fill the first and second trenches.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.