Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof

US9920077B2 · kind B2 · utility

Assignee

• L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR

Inventors

• Antonio Sanchez · Tsukuba, JP
• Jean-Marc Girard · Versailles, FR
• Gennadiy Itov · Flemington, US
• Manish Khandelwal · Danbury, US
• Matthew Damien Stephens · Kingsport, US
• Peng Zhang · Montvale, US

Key dates

• Filing date: Sep 19, 2014
• Grant date: Mar 20, 2018
• Expiry date: Sep 19, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02219
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

Halogen free amine substituted trisilylamine and tridisilylamine compounds and a method of their preparation via de-hydrogenative coupling between the corresponding unsubstituted trisilylamines and amines catalyzed by transition metal catalysts is described. This new approach is based on the catalytic dehydrocoupling of a Si—H and a N—H moiety to form an Si—N containing compound and hydrogen gas. The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The —Si—N containing products are halide free. Such compounds can be useful for the deposition of thin films by chemical vapor deposition or atomic layer deposition of Si containing films.