Devices and methods for spectroscopic analysis
US9927361B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 13, 2014 |
| Grant date | Mar 27, 2018 |
| Priority date | — |
| Expiry date | Oct 16, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to devices and methods for spectrometric analysis of light-emitting samples. The device comprises a particle beam source, which generates a primary particle beam directed to the sample in such a way that the primary particle beam is incident on the sample and photons are released from the sample due to the interaction between primary particle beam and sample material. Moreover, the device comprises a plurality of light-pickup elements, which are suitable for capturing the photons released from the sample, wherein the light-pickup elements capture the photons emitted in the respectively assigned solid-angle range. Furthermore, the device comprises conduction elements, which are embodied to forward captured photons to an evaluation unit, and an analysis system, which comprises a plurality of evaluation units in such a way that photons captured by each light-pickup element are analyzed spectrally.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.