Accelerometer with offset compensation
US9927459B2 · kind B2 · utility
4Cited by
15References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2013 |
| Grant date | Mar 27, 2018 |
| Priority date | — |
| Expiry date | Jan 8, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer has a movable mass suspended above a substrate, and a variable acceleration capacitor supported by the substrate. The movable mass has a mass anchor securing the mass to the substrate, while the acceleration capacitor has both a stationary finger extending from the substrate, and a movable finger extending from the movable mass. The accelerometer also has a variable stress capacitor, which also includes the stress finger, for determining movement of the mass anchor relative to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.