Chamber for degassing substrates
US9934992B2 · kind B2 · utility
1Cited by
4References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 10, 2015 |
| Grant date | Apr 3, 2018 |
| Priority date | — |
| Expiry date | Dec 10, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67207
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A heater or cooler chamber for a batch of more than one workpiece includes a heat storage block. In the block a multitude of pockets are provided, whereby each of the pockets may be closed or opened by a controllably operated door. A heater or cooler arrangement is applied. The pockets are tailored to surround a workpiece applied therein in a non-contact closely spaced manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.