Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device
US9938134B2 · kind B2 · utility
4Cited by
15References
20Claims
0Family size
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Key dates
| Filing date | Jul 8, 2016 |
| Grant date | Apr 10, 2018 |
| Priority date | — |
| Expiry date | Jul 8, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0792
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A microelectromechanical systems (MEMS) package with high gettering efficiency is provided. A MEMS device is arranged over a logic chip, within a cavity that is hermetically sealed. A sensing electrode is arranged within the cavity, between the MEMS device and the logic chip. The sensing electrode is electrically coupled to the logic chip and is a conductive getter material configured to remove gas molecules from the cavity. A method for manufacturing the MEMS package is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.