Patent · US Active

Modular filter cassette

US9943789B2 · kind B2 · utility

1Cited by
49References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 3, 2012
Grant dateApr 17, 2018
Priority date
Expiry dateJan 19, 2034

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB01D2313/21
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

The present disclosure relates to modular filtration cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filter housing may define a filter cavity comprising an upstream portion and a downstream portion. The filter may further comprise a filter element disposed in the filter cavity. The filter element may at least partially overlap the filter inlet on a first side of the filter element. The filter element may comprise a rectangular pleated filter with a set of pleats having a first set of pleat tips on an upstream side of the filter element and a second set of pleat tips on a downstream side of the pleated filter.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.