Systems and methods for enhanced bolometer response
US9945729B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2015 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | Aug 22, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/0077
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods may be provided for forming enhanced infrared absorption microbolometers. An enhanced infrared absorption microbolometer may include a metal cap formed from a thin layer of oxidizing metal such as titanium and/or a titanium oxide. The metal cap may be formed within a bridge portion of the microbolometer. The bridge portion may include other layers such as first and second absorber layers disposed on opposing sides of a layer of temperature sensitive resistive material. The layer of temperature sensitive resistive material may be located between the metal cap and a reflecting metal layer formed on a readout integrated circuit for the microbolometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.