Environmentally green process and composition for cobalt wet etch

US9947547B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Frank W. Mont · Troy, US
• Cornelius Brown Peethala · Slingerlands, US
• Shariq Siddiqui · Albany, US
• Randolph F. Knarr · Goldens Bridge, US

Key dates

• Filing date: Jun 29, 2016
• Grant date: Apr 17, 2018
• Expiry date: Jun 29, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/76897
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An environmentally green wet etch process for selective removal of cobalt metal generally includes applying water that is free of added buffers, acids, and/or bases to a substrate including exposed cobalt metal. The process can be utilized to form recesses where desired such as may be implemented for metal contact fill, metal gate fill, interconnect fill, or the like.