Inventor · Troy, NY, US

Frank W. Mont

28Patents
4h-index
39Co-inventors
59Inventor score

Filing activity: Jan 25, 2007 → Jan 28, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US7483212B2 Optical thin film, semiconductor light emitting device having the same and methods of fabricating the same Physics 37 Active
US9613862B2 Chamferless via structures Electricity 13 Active
US9373543B1 Forming interconnect features with reduced sidewall tapering Electricity 6 Active
US9831174B1 Devices and methods of forming low resistivity noble metal interconnect Electricity 5 Active
US10032668B2 Chamferless via structures Electricity 4 Active
US9799555B1 Cobalt interconnects covered by a metal cap Electricity 3 Active
US9799559B1 Methods employing sacrificial barrier layer for protection of vias during trench formation Electricity 2 Active
US10056291B2 Post spacer self-aligned cuts Electricity 1 Active
US10157833B1 Via and skip via structures Electricity 1 Active
US10062560B1 Method of cleaning semiconductor device Electricity 1 Active
US10388565B2 Chamferless via structures Electricity 1 Active
US9947547B2 Environmentally green process and composition for cobalt wet etch Electricity 1 Active
US9831124B1 Interconnect structures Electricity 1 Active
US10957588B2 Chamferless via structures Electricity 0 Active
US10658176B2 Methods of mitigating cobalt diffusion in contact structures and the resulting devices Electricity 0 Active
US10636698B2 Skip via structures Electricity 0 Active
US10679937B2 Devices and methods of forming low resistivity noble metal interconnect Electricity 0 Active
US10056292B2 Self-aligned lithographic patterning Electricity 0 Active
US9732427B2 Tunable nanoporous films on polymer substrates, and method for their manufacture Emerging Cross-Sectional Technologies 0 Active
US10283608B2 Low resistance contacts to source or drain region of transistor Electricity 0 Active
US10262892B2 Skip via structures Electricity 0 Active
US11610839B2 Dummy fill structures Electricity 0 Active
US10636656B2 Methods of protecting structure of integrated circuit from rework Electricity 0 Active
US10937694B2 Chamferless via structures Electricity 0 Active
US11205699B2 Epitaxial semiconductor material regions for transistor devices and methods of forming same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.