Patent · US Active

Nanowire-based mechanical switching device

US9947805B2 · kind B2 · utility

0Cited by
8References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 10, 2016
Grant dateApr 17, 2018
Priority date
Expiry dateMay 10, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01H9/0271
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.