Patent · US Active

Methodology and structure for field plate design

US9954097B2 · kind B2 · utility

8Cited by
9References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 3, 2017
Grant dateApr 24, 2018
Priority date
Expiry dateFeb 3, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/378
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The present disclosure relates to a transistor device having a field plate, and a method of formation. In some embodiments, the transistor device has a gate electrode disposed over a substrate between a source region and a drain region. One or more dielectric layers laterally extend from over the gate electrode to a location between the gate electrode and the drain region. A field plate is located within an inter-level dielectric (ILD) layer overlying the substrate. The field plate laterally extends from over the gate electrode to over the location and vertically extends from the one or more dielectric layers to a top surface of the ILD layer. A conductive contact is arranged over the drain region and is surrounded by the ILD layer. The conductive contact extends to the top surface of the ILD layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.