Copolymer and associated layered article, and device-forming method

US9957339B2 · kind B2 · utility

Assignees

• Rohm and Haas Electronic Materials LLC · US
• The University Of Queensland · AU

Inventors

• James W. Thackeray · Braintree, US
• Ke Du · Tangxia, CN
• Peter Trefonas, III · Medway, US
• Idriss Blakey · Brisbane, AU
• Andrew Keith Whittaker · Brisbane, AU

Key dates

• Filing date: Aug 7, 2015
• Grant date: May 1, 2018
• Expiry date: Aug 7, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/8592
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A copolymer is prepared by the polymerization of monomers that include an ultraviolet absorbing monomer, and a base-solubility-enhancing monomer. The copolymer is useful for forming a topcoat layer for electron beam and extreme ultraviolet lithographies. Also described are a layered article including the topcoat layer, and an associated method of forming an electronic device.