Chromatic range sensor including dynamic intensity compensation function
US9958266B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2015 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Nov 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0064
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chromatic point sensor (CPS) system is provided, which compensates for potential errors due to input spectral profile intensity inconsistencies that arise when driving a CPS illumination source using different power levels. The CPS system includes an optical pen comprising a confocal optical path including a chromatically dispersive element and configured to focus different wavelengths at different distances proximate to a workpiece surface to be measured, an illumination source, and CPS electronics. The CPS electronics include: an illumination source control portion configured to drive the illumination source using different power levels; a CPS wavelength detector comprising a plurality of pixels distributed along a measurement axis of the CPS wavelength detector to provide output spectral profile data; and a power level spectral compensation portion configured to compensate the output spectral profile data to remove or reduce potential errors due to input spectral profile intensity inconsistencies that arise when driving the CPS illumination source using the different power levels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.