Method and apparatus for manufacturing single crystal
US9959611B2 · kind B2 · utility
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3References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 25, 2016 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Aug 25, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Disclosed herein is a method for manufacturing a single crystal, the method includes: photographing an image of a boundary portion between the single crystal and a melt by a camera during a single crystal pull-up process according to a Czochralski method; comparing at least one pixel included in a left side region with respect to an extension line of a pull-up shaft of the single crystal and at least one pixel included in a right side region with respect to the extension line; and determining an abnormality in a luminance distribution of the image from a result of the comparing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.