Destructive inspection method and quality determination method for vitreous silica crucible
US9964478B2 · kind B2 · utility
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12Claims
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Key dates
| Filing date | Sep 24, 2015 |
| Grant date | May 8, 2018 |
| Priority date | — |
| Expiry date | Sep 24, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0064
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A destructive inspection method of a vitreous silica crucible for pulling a silicon single crystal evaluates a crack state of an inner surface of the vitreous silica crucible supported by a graphite susceptor when a load is instantaneously applied to at least one point on the inner surface via an automatic center punch while pushing the tip portion of the automatic center punch against the inner surface. The destructive inspection method can inspect the vitreous silica crucible under conditions as close to the actual conditions of use as possible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.