Optical system with aperture device having plurality of aperture elements

US9964673B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Benjamin Sigel · Aalen, DE
• Sascha Bleidistel · Aalen, DE

Key dates

• Filing date: Feb 4, 2011
• Grant date: May 8, 2018
• Expiry date: Jan 24, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/7025
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical system has an aperture device having a multiplicity of aperture elements for the delimitation of the cross section of a ray bundle running through the optical system. The aperture device has a first aperture element, which is pivotable about a first rotation axis between an engagement position in the beam path of the optical system and a neutral position outside the beam path of the optical system and has a first aperture opening delimited by a first aperture edge. The aperture device also has at least one second aperture element, which is pivotable about a second rotation axis between an engagement position in the beam path of the optical system and a neutral position outside the beam path of the optical system and has a second aperture opening delimited by a second aperture edge. The second aperture opening is smaller than the first aperture opening. The aperture elements pivoted into the engagement position form an effective aperture opening. The aperture edges of aperture elements pivoted into the engagement position do not lie in a common plane.