Inventor · Aalen, DE

Benjamin Sigel

3Patents
0h-index
9Co-inventors
27Inventor score

Filing activity: Feb 4, 2011 → Feb 23, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US9030644B2 Projection exposure apparatus for semiconductor lithography including an actuator system Physics 0 Active
US9964673B2 Optical system with aperture device having plurality of aperture elements Physics 0 Active
US9851555B2 Optical component Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.