Patent · US Active

Method for forming micro-electro-mechanical system (MEMS) beam structure

US9969613B2 · kind B2 · utility

0Cited by

4References

19Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Michael T. Brigham · Waterbury, US
Christopher V. Jahnes · Upper Saddle River, US
Cameron E. Luce · Colchester, US
Jeffrey C. Maling · Grand Isle, US
William J. Murphy · North Ferrisburgh, US
Anthony K. Stamper · Williston, US
Eric J. White · Vergennes, US

Key dates

Filing date	Apr 12, 2013
Grant date	May 15, 2018
Priority date	—
Expiry date	May 6, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0714
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a Micro-Electro-Mechanical System (MEMS) beam structure by venting both tungsten material and silicon material above and below the MEMS beam to form an upper cavity above the MEMS beam and a lower cavity structure below the MEMS beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.