Integration of automated cryopump safety purge
US9970427B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2008 |
| Grant date | May 15, 2018 |
| Priority date | — |
| Expiry date | Mar 30, 2031 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B49/065
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.