Multi-spot scanning collection optics
US9970883B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2017 |
| Grant date | May 15, 2018 |
| Priority date | — |
| Expiry date | Jan 5, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1056
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.