Patent · US Active

Rocker device for a micromechanical Z-sensor

US9970957B2 · kind B2 · utility

0Cited by
0References
8Claims
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Assignee

Inventors

Key dates

Filing dateOct 28, 2015
Grant dateMay 15, 2018
Priority date
Expiry dateJan 11, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01P2015/0831
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A rocker device for a micromechanical Z-sensor, including two rocker arms which are mounted around a torsion spring and which are asymmetric relative to the torsion spring; the rocker arms having first perforations; at least one of the rocker arms having at least one opening, a diameter of the first perforations being configured in a defined manner to be smaller than a diameter of the opening; and a cavity for connecting the first perforations to the at least one opening being formed in at least one of the rocker arms.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.