Methods and devices for the computer-aided determination of deviation patterns during the production and/or testing of a multiplicity of dies and computer program products

US9970983B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Reinhard Schachtner · Undorf, DE
• Gerhard Poeppel · Duggendorf, DE

Key dates

• Filing date: Feb 3, 2015
• Grant date: May 15, 2018
• Expiry date: May 6, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L22/34
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In various embodiments, a method for the computer-aided determination of deviation patterns during at least one of the production or testing of a multiplicity of dies is provided. The dies are uniquely identified. The method may include determining, for each die of the multiplicity of dies and for at least one measurement process of a plurality of measurement processes which are applied to at least one portion of the dies, a measurement value which was determined in the measurement process for the respective die; and carrying out a blind source separation using the measurement values, thereby determining the deviation patterns for the dies.