Bi-stable MEMS cantilever heat harvester
US9972763B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2016 |
| Grant date | May 15, 2018 |
| Priority date | — |
| Expiry date | Jan 28, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/306
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A bi-stable micro-electrical mechanical system (MEMS) heat harvester is provided. A bi-stable MEMS cantilever located between a hot temperature surface and a cold temperature surface, and is made up of a first MEMS material layer, having a first coefficient of thermal expansion. A second MEMS material layer is in contact with the first MEMS material layer, and has a second coefficient of thermal expansion less than the first coefficient of thermal expansion. A tensioner, made from a material having a tensile stress greater than the stress of the first or second MEMS materials, is connected to the cantilever. The heat harvester also includes a mechanical-to-electrical power converter, which may be a piezoelectric device or an electret device. The bi-stable MEMS cantilever may include a thermal expander having a coefficient of thermal expansion greater than the second coefficient of thermal expansion. The thermal expander is connected to the tensioner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.