Patent · US Active

Sensor capable of sensing pressure by means of the deformation of a wrinkled piezoelectric layer

US9981420B2 · kind B2 · utility

5Cited by

16References

11Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Lamine Benaissa · Massy, FR
Jean-Sebastien Moulet · Chambéry, FR

Key dates

Filing date	Oct 16, 2014
Grant date	May 29, 2018
Priority date	—
Expiry date	Oct 16, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/3105
WIPO fieldOther special machines
WIPO sectorMechanical engineering

Abstract

A pressure-sensitive sensor including a substrate supporting a piezoelectric layer of a piezoelectric material. The piezoelectric layer includes surface undulations as wrinkles on which pressure is exerted upon use of the sensor. The piezoelectric layer is sandwiched between two electrodes for collecting charges generated by deformation of the piezoelectric layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.