Deep-etched multipoint probe
US9983231B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 20, 2013 |
| Grant date | May 29, 2018 |
| Priority date | — |
| Expiry date | Dec 24, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multipoint probe for establishing an electrical connection between a test apparatus and a test sample, the multipoint probe comprising a base defining a top surface and a plurality of traces provided on the top surface, each trace individually interconnecting a contact pad and a contact electrode for establishing the electrical connection to the test sample, each trace comprising a wide portion connected to the contact pad and a narrow portion connected to the contact electrode; the first top surface comprising first intermediate surfaces, each interconnecting a pair of neighboring traces at their respective wide portions, and second intermediate surfaces, each interconnecting a pair of neighboring traces at their respective narrow portions, and the first intermediate surfaces being provided on a first level and the second intermediate surfaces being provided on a second level above the first level relative to the base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.