Cointegration of optical waveguides, microfluidics, and electronics on sapphire substrates

US9989467B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Yann Astier · Dobbs Ferry, US
• Ning Li · White Plains, US
• Devendra K. Sadana · Pleasantville, US
• Joshua T. Smith · Hudson, US
• William T. Spratt · Beekman, US

Key dates

• Filing date: Feb 14, 2017
• Grant date: Jun 5, 2018
• Expiry date: Feb 15, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10H29/10
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A semiconductor structure includes a first optical waveguide and a second optical waveguide located on a sapphire substrate. The first optical waveguide and the second optical waveguide each include a core portion of gallium nitride (GaN), and a cladding layer laterally surrounding the core portion. The cladding layer includes a material having a refractive index less than a refractive index of the sapphire substrate.