Patent · US Active

Apparatus and method for correlating images of a photolithographic mask

US9990737B2 · kind B2 · utility

1Cited by

1References

35Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Dieter Weber · Leonberg, DE
Markus Waiblinger · Dresden, DE

Key dates

Filing date	Dec 12, 2014
Grant date	Jun 5, 2018
Priority date	—
Expiry date	Dec 12, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31744
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

An apparatus for correlating at least two images of a photolithographic mask that at least partially overlap, in which the apparatus includes a correlation unit that is provided to use at least one random variation, which is present in the at least two images, of at least one structural element of the photolithographic mask for the correlation of the at least two images.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.