Inventor · Dresden, DE

Markus Waiblinger

5Patents
1h-index
9Co-inventors
40Inventor score

Filing activity: Nov 17, 2006 → Sep 6, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7820343B2 Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrate Physics 1 Active
US9990737B2 Apparatus and method for correlating images of a photolithographic mask Electricity 1 Active
US7811727B2 Method for determining an exposure dose and exposure apparatus Emerging Cross-Sectional Technologies 0 Active
US9431212B2 Method for determining the performance of a photolithographic mask Physics 0 Active
US11079674B2 Method and apparatus for ascertaining a repair shape for processing a defect of a photolithographic mask Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.