Patent · US Active

Method and apparatus of using peak force tapping mode to measure physical properties of a sample

US9995765B2 · kind B2 · utility

1Cited by
54References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 22, 2016
Grant dateJun 12, 2018
Priority date
Expiry dateMar 22, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q60/32
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.