Charged-particle beam microscopy
US9997331B1 · kind B1 · utility
5Cited by
5References
18Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 28, 2015 |
| Grant date | Jun 12, 2018 |
| Priority date | — |
| Expiry date | Jan 28, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2826
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged-particle beam microscope includes a charged-particle beam source to generate a charged-particle beam. A stage is provided to hold a sample in the path of the charged-particle beam. Beam optics are provided to illuminate the sample with the charged-particle beam. One or more detectors are provided to detect radiation emanating from the sample as a result of the illumination. A controller may control one or more of the beam optics, stage, and detectors to generate an image of the sample based on the detected radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.