Patent · US Active

Target profile for a physical vapor deposition chamber target

USD1007449S1 · kind S1 · design

6Cited by
108References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 7, 2021
Grant dateDec 12, 2023
Priority date
Expiry dateDec 12, 2038

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.