MEMS mass flow controller
USD1032386S1 · kind S1 · design
2Cited by
7References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 17, 2022 |
| Grant date | Jun 25, 2024 |
| Priority date | — |
| Expiry date | Jun 25, 2039 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.