Patent · US Active

Deposition ring for physical vapor deposition chamber

USD1040304S1 · kind S1 · design

14Cited by
39References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 25, 2021
Grant dateAug 27, 2024
Priority date
Expiry dateAug 27, 2039

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.