Ring for an anti-rotation process kit for a substrate processing chamber
USD1049067S1 · kind S1 · design
12Cited by
32References
1Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 4, 2022 |
| Grant date | Oct 29, 2024 |
| Priority date | — |
| Expiry date | Oct 29, 2039 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.