Wafer holding frame
USD291413S · kind S · design
11Cited by
9References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 8, 1985 |
| Grant date | Aug 18, 1987 |
| Priority date | — |
| Expiry date | Aug 18, 2001 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.