Processing tube for use in a semiconductor wafer heat processing apparatus
USD406113S · kind S · design
28Cited by
10References
1Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 24, 1997 |
| Grant date | Feb 23, 1999 |
| Priority date | — |
| Expiry date | Feb 23, 2013 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.