Process chamber lid
USD441348S · kind S · design
15Cited by
34References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 1999 |
| Grant date | May 1, 2001 |
| Priority date | — |
| Expiry date | May 1, 2015 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.