Wafer conveyor arm for semiconductor manufacturing equipment
USD525408S1 · kind S1 · design
7Cited by
10References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 14, 2004 |
| Grant date | Jul 18, 2006 |
| Priority date | — |
| Expiry date | Jul 18, 2020 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.